J.H. Stathis, R. Bolam, et al.
INFOS 2005
No abstract available.
J.H. Stathis, R. Bolam, et al.
INFOS 2005
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
R.W. Gammon, E. Courtens, et al.
Physical Review B
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007