Paper
The Qx-coder
M.J. Slattery, Joan L. Mitchell
IBM J. Res. Dev
M.J. Slattery, Joan L. Mitchell
IBM J. Res. Dev
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Bowen Zhou, Bing Xiang, et al.
SSST 2008