Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A theory of the electromagnetic field in moving, finitely deformed elastic dielectrics is developed. The equations for a weak field superimposed on a strong field and an arbitrary state of finite deformation are deduced. It is shown how certain electro- and magneto-optical effects and the retardation of a sound wave by a strong magnetic field in a dielectric can be explained and correlated. © 1963.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
D.D. Awschalom, J.-M. Halbout
Journal of Magnetism and Magnetic Materials
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Julien Autebert, Aditya Kashyap, et al.
Langmuir