Conference paper
Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
J. LaRue, C. Ting
Proceedings of SPIE 1989
R.B. Morris, Y. Tsuji, et al.
International Journal for Numerical Methods in Engineering
Tong Zhang, G.H. Golub, et al.
Linear Algebra and Its Applications
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008