E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
David B. Mitzi
Journal of Materials Chemistry