Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Inequality constrained minimization problems are often solved byconsidering a sequence of parameterized barrier functions. Each barrierfunction is approximately minimized and the relevant parameterssubsequently adjusted.It is common for the estimated solution to one barrier function problemto be used as a starting estimate for the next. However, this hasunfortunate repercussions for the standard Newton-like methods applied tothe barrier subproblem.In this note, we consider a class of alternative Newton methods whichattempt to avoid such difficulties.Such schemes have already proved of use in the Harwell Subroutine Libraryquadratic programming codes {\tt VE14} and {\tt VE19}. © 1994, Springer-Verlag Berlin Heidelberg. All rights reserved.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Arnon Amir, Michael Lindenbaum
IEEE Transactions on Pattern Analysis and Machine Intelligence
Peter Wendt
Electronic Imaging: Advanced Devices and Systems 1990
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007