The DX centre
T.N. Morgan
Semiconductor Science and Technology
We present an ultra thin heat sink for electronics, combining optimized impinging slot-jets, micro-channels and manifolds for efficient cooling. We first introduce a three-dimensional numerical model of the heat transfer structure, to investigate its hydrodynamic and thermal performance and its sensitivity to geometric parameters. In a second step we propose a three-dimensional hydrodynamic numerical model representing the complete system. Based on this model we design a novel manifold providing uniform fluid distribution. In order to save computational time a simpler semi-empirical model is proposed and validated. The semi-empirical model allows a robust optimization of the heat sink geometric parameters. The design is optimized for a 2×2cm2 chip and provides a total thermal resistance of 0.087cm2K/W for flow rates <1l/min and an overall pressure drop <0.1bar. This results in a maximum cooling capacity of 750W/cm2 for a temperature difference between fluid inlet and chip of 65K. © 2010 Elsevier Inc.
T.N. Morgan
Semiconductor Science and Technology
Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
J.C. Marinace
JES