Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The molecular structure of tetraselenafulvalene (TSeF) dissolved in a nematic crystal solvent is determined from the PMR spectra including 77Se satellites. The molecule is found to be either puckered in a boat form or possessing a broad potential function for the in-phase puckering motion. The dihedral angle between the SeHCCHSe and Se2CCSe2 plane is 15.5 ± 0.6°. The structure is in good agreement with that of the dimerized TSeF in the solid state. Some 77Se indirect coupling constants are also determined. © 1980, All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
Gregory Czap, Kyungju Noh, et al.
APS Global Physics Summit 2025
A. Gangulee, F.M. D'Heurle
Thin Solid Films