William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
This study compares the performance of linear and quadratic tetrahedral elements and hexahedral elements in various structural problems. The problems selected demonstrate different types of behavior, namely, bending, shear, torsional and axial deformations. It was observed that the results obtained with quadratic tetrahedral elements and hexahedral elements were equivalent in terms of both accuracy and CPU time. © 1992.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Richard M. Karp, Raymond E. Miller
Journal of Computer and System Sciences
Tong Zhang, G.H. Golub, et al.
Linear Algebra and Its Applications
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004