William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Frank Stem
C R C Critical Reviews in Solid State Sciences
Hiroshi Ito, Reinhold Schwalm
JES
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter