Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Molecular orbital calculations have been performed on a complex of chromium with iVjiV’-diphenyl-pyromellitimide, a compound structurally similar to the PMDA part of the PMDA-ODA polyimide repeat unit. The PMDA/Cr complex investigated involving chromium located above the central benzene ring is one of several possible complexes formed under the experimental conditions of clean surfaces and ultrahigh vacuum. The calculated C Is core levels, together with Koopmans’ approximation, provide a reasonable fit to the carbon is XPS data, if it is assumed that the observed spectrum reflects a portion of both reacted and unreacted molecular soecies. © 1987, American Chemical Society. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
B.A. Hutchins, T.N. Rhodin, et al.
Surface Science
Revanth Kodoru, Atanu Saha, et al.
arXiv
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983