M. Nonnenmacher, H.K. Wickramasinghe
Ultramicroscopy
We describe a new type of jet plating that uses a focused high-frequency sound field directed through the center of the jet. The acoustic jet results in an improved morphology for gold and copper depositions although plating rates are not enhanced. Four-point probe measurements of acoustic-jet plated copper lines show up to a 50% decrease in electrical resistivity compared to jet plated deposits.
M. Nonnenmacher, H.K. Wickramasinghe
Ultramicroscopy
K. Gopalakrishnan, R.S. Shenoy, et al.
IEDM 2005
C.C. Williams, J. Slinkman, et al.
Applied Physics Letters
David W. Abraham, C.C. Williams, et al.
Journal of Microscopy