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PaperNeural network based iterative learning control for product qualities in batch processesZhihua Xiong, Yixin Xu, et al.International Journal of Modelling, Identification and Control
Conference paperCharacterization of photoresist spatial resolution by interferometric lithographyJohn A. Hoffnagle, William D. Hinsberg, et al.Microlithography 2003
Conference paperIntegration of polymer self-assembly for lithographic applicationJoy Y. Cheng, Daniel P. Sanders, et al.SPIE Advanced Lithography 2008