Apostol Natsev, Alexander Haubold, et al.
MMSP 2007
This paper describes the architecture of a robot system de signed both to work in an integrated manufacturing environment and to support continuing research in programmable automation. Major system components include a controller, robot and sensor hardware, operator's pendant, and system software. A new high-level interactive language, AML, allows the user to combine manipulation, sensing, com putational, and data processing functions provided by the system. Im portant aspects of the system design objectives, major functional compo nents, and the AML language are described, and examples drawn from an actual production application are used to illustrate the interrelation ship of the topics discussed. Copyright © 1983 by The Institute of Electrical and Electronics Engineers, Inc.
Apostol Natsev, Alexander Haubold, et al.
MMSP 2007
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CACM
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ASP-DAC 2008
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Photomask and Next-Generation Lithography Mask Technology 2004