Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Fausto Bernardini, Holly Rushmeier
Proceedings of SPIE - The International Society for Optical Engineering
Vladimir Yanovski, Israel A. Wagner, et al.
Ann. Math. Artif. Intell.