Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We report the synthesis of TiO 2 nanoparticles that uses the low-temperature reaction of low-valent organometallic precursors. Bis-(cyclooctatetraene)titanium reacts with dimethyl sulfoxide in organic solution at temperatures as low as room temperature to produce TiO 2. In the absence of any supporting ligand, the reaction gives precipitation of amorphous TiO 2 powder; however, in the presence of basic ligands such as tributylphosphine, tributylphosphine oxide and trioctylphosphine oxide, the precipitation is arrested, and chemically distinct, isolated, internally crystalline TiO 2 nanoparticles are formed. © 2005 American Chemical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Physica E: Low-Dimensional Systems and Nanostructures
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ACS Macro Letters
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Digital Discovery