Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Using a display-type analyzer, we have measured the angular and energy distribution of O+ ions desorbed from a V2O5(010) surface by incident photons. The desorbed ions were mass-analyzed using time-of-flight gating techniques. The angular distribution of desorbed ions was found to be strongly peaked in the direction of the surface normal. This strongly directional desorption pattern reflects the local bonding geometry of the topmost oxygen atoms in the surface. The observed photoexcitation spectrum of the ion yiel can be explained with the core level Auger decay model formulated by Knotek and Feibelman. © 1980, All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
H.D. Dulman, R.H. Pantell, et al.
Physical Review B
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting