PaperCorrections to proximity effects in electron beam lithography. II. ImplementationMihir ParikhJournal of Applied Physics
PaperCalculation of dissociative ionization cross sections of diatomic moleculesMihir ParikhPhysical Review A
PaperCalculation of changes in pattern dimensions to compensate for proximity effects in electron lithographyMihir ParikhJournal of Applied Physics
PaperDependence of pattern dimensions on proximity functions in electron beam lithographyMihir ParikhJournal of Applied Physics