William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Atomically-resolved cross-sectional topographic images of AlGaAs/GaAs multilayers, which includes a sequence of 1, 2, 5, and 10 nm AlGaAs and GaAs layers, have been made using a scanning tunneling microscope. All the layers appear distinct and the dimensions of the as-grown layers can be accurately measured. Furthermore, alloy fluctuations and interface roughness over 2 nm length scales and ordering along certain directions are clearly observed. © 1993.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011