Modeling UpLink power control with outage probabilities
Kenneth L. Clarkson, K. Georg Hampel, et al.
VTC Spring 2007
A new automation software creates a search model as an initial setup and searches for a user-defined target in atomic force microscopes or stylus profilometers used in semiconductor manufacturing. The need for such automation has become critical in manufacturing lines. The new method starts with a survey map of a small area of a chip obtained from a chip-design database or an image of the area. The user interface requires a user to point to and define a precise location to be measured, and to select a macro function for an application such as line width or contact hole. The search algorithm automatically constructs a range of possible scan sequences within the survey, and provides increased speed and functionality compared to the methods used in instruments to date. Each sequence consists in a starting point relative to the target, a scan direction, and a scan length. The search algorithm stops when the location of a target is found and criteria for certainty in positioning is met. With today's capability in high speed processing and signal control, the tool can simultaneously scan and search for a target in a robotic and continuous manner. Examples are given that illustrate the key concepts. © 2001 SPIE.
Kenneth L. Clarkson, K. Georg Hampel, et al.
VTC Spring 2007
Daniel J. Costello Jr., Pierre R. Chevillat, et al.
ISIT 1997
Fausto Bernardini, Holly Rushmeier
Proceedings of SPIE - The International Society for Optical Engineering
David W. Jacobs, Daphna Weinshall, et al.
IEEE Transactions on Pattern Analysis and Machine Intelligence