Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Using high-resolution photoelectron spectroscopy with synchrotron radiation we have accurately determined the core-level binding energies in the nonuranium atoms in USbxTe1-x and UAsxSe1-x as a function of the stoichiometric composition. With the use of a Born-Haber cycle a relation between the measured shifts and heat-of-formation data for these compounds is formulated. The analysis demonstrates that photoelectron spectroscopy can become a most valuable method for deriving new heat-of-formation data. © 1982 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Hiroshi Ito, Reinhold Schwalm
JES
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films