Fausto Bernardini, Holly Rushmeier
Proceedings of SPIE - The International Society for Optical Engineering
Fausto Bernardini, Holly Rushmeier
Proceedings of SPIE - The International Society for Optical Engineering
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
A.R. Gourlay, G. Kaye, et al.
Proceedings of SPIE 1989
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004