Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Critical fluctuations in kinetic Ising models are interpreted in terms of cluster reactions. The basic assumption, that clusters with l spins grow at a rate lr, is tested by Monte Carlo computations in the single-spin-flip case. The dynamic susceptibilities associated with order parameter and energy are then calculated also for nonzero magnetic field, and are shown to fulfill dynamic scaling. The exponent (2-r)βδ of the relaxation times can be different from the susceptibility exponent γ. © 1974 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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ACS Nano
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