Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Ceramics, both crystalline and amorphous, as used today for such applications as processing, tranferring, storing, printing and displaying information are reviewed. State of the art in materials and processes as well as challenges that need to be met to support the growth of the industry are discussed. © 1987.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
J. Tersoff
Applied Surface Science
Revanth Kodoru, Atanu Saha, et al.
arXiv