Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Peter Wendt
Electronic Imaging: Advanced Devices and Systems 1990
R.B. Morris, Y. Tsuji, et al.
International Journal for Numerical Methods in Engineering
A.R. Gourlay, G. Kaye, et al.
Proceedings of SPIE 1989