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Macromolecules
Chemical vapor deposition environments, while technologically quite important, are difficult to study using traditional analytical probes, such as electron-based techniques and optical tools. In this work, we will describe some of the ways in which X-rays can be applied to understand not only the gas phase composition through fluorescence, but also surface processes such as nucleation and diffusion. © 1995.
Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules
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Physical Review B
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SPIE Advanced Lithography 2010
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