Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Ehud Altman, Kenneth R. Brown, et al.
PRX Quantum
Elena Cabrio, Philipp Cimiano, et al.
CLEF 2013
Kaoutar El Maghraoui, Gokul Kandiraju, et al.
WOSP/SIPEW 2010