Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Ziv Bar-Yossef, T.S. Jayram, et al.
Journal of Computer and System Sciences
Matthew A Grayson
Journal of Complexity
Peter Wendt
Electronic Imaging: Advanced Devices and Systems 1990