E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Impurities and additives used in the liquid‐phase densifica‐tiondensification of silicon nitride ceramics are preferentially partitioned to the residual intergranular glass phase remaining in these materials. On the basis of a simple phenomenological ionic migration model, it is proposed and demonstrated that a high‐temperature electrolysis treatment may be used to modify the concentration of both the additive and impurities. The compositional modification has a number of consequences and, as an illustration, the improvement in high‐frequency dielectric loss produced as a result of the electrolysis treatment is presented. Copyright © 1984, Wiley Blackwell. All rights reserved
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano