Conference paper
Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
We consider algebraic functions that are rational functions of roots (of various degrees) of rational functions of indeterminates. We associate a cost C(d) with the extraction of a dth root and assume that C satisfies certain natural axioms. We show that the minimum cost of computing a finite set of algebraic functions of the form considered is C(d1) + ... + C(dr), where d1...dr are the torsion orders of the Galois group of the extension generated by the functions. © 1981.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Matthew A Grayson
Journal of Complexity
Richard M. Karp, Raymond E. Miller
Journal of Computer and System Sciences
Paul J. Steinhardt, P. Chaudhari
Journal of Computational Physics