Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Let P be (the boundary of) a simple polygon with n vertices. For a vertex p of P, let φ{symbol}(p) be the set of points on P that are farthest from p, where the distance between two points is the length of the (Euclidean) shortest path that connects them without intersecting the interior of P. In this paper, we present an O(n log n) algorithm to compute a member of φ{symbol}(p) for every vertex p of P. As a corollary, the external diameter of P can also be computed in the same time. © 1991.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Charles A Micchelli
Journal of Approximation Theory
Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011
John R. Kender, Rick Kjeldsen
IEEE Transactions on Pattern Analysis and Machine Intelligence