J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998
J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998
Chi-Leung Wong, Zehra Sura, et al.
I-SPAN 2002
Inbal Ronen, Elad Shahar, et al.
SIGIR 2009
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007