Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Paper
Control of morphology orientation in lithographically patternable diblock copolymers
Related
J.A. Barker, D. Henderson, et al.
Molecular Physics
Conference paper
Learning Reduced Order Dynamics via Geometric Representations
Imran Nasim, Melanie Weber
SCML 2024
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films