Beomseok Nam, Henrique Andrade, et al.
ACM/IEEE SC 2006
Beomseok Nam, Henrique Andrade, et al.
ACM/IEEE SC 2006
Raghu Krishnapuram, Krishna Kummamuru
IFSA 2003
Bowen Zhou, Bing Xiang, et al.
SSST 2008
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004