L. Comerford, M.J. Brady
Electronics Letters
We have measured the ultraviolet dispersion of several microscope objectives and we find that all of them are limited by axial chromatic aberration when used for polychromatic exposure of photoresist. We show how to measure and correct for the ultraviolet focus shift, and estimate the corrected resolution. Certain lenses are able to produce micron features over millimeter fields.
L. Comerford, M.J. Brady
Electronics Letters
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Physica D: Nonlinear Phenomena
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IEEE TAS
D.J. Frank, A. Davidson, et al.
Applied Physics Letters