Cracking and delamination of coatings

P. Martensson, R.M. Feenstra

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Q.R. Huang, Ho-Cheol Kim, et al.

Macromolecules

Julian J. Hsieh

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Joy Y. Cheng, Daniel P. Sanders, et al.

SPIE Advanced Lithography 2008