Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A demonstration of critical scaling of the magnetic susceptibility in a YBa2Cu3O7 single crystal is performed for 350 frequencies (f) from 1 kHz to 2 MHz. Near the vortex-glass melting temperature TM(H) and in the linear-response limit, the susceptibility χχeχi(π-φ) follows the scaling relations χ∼1-(T/TM)ν/2 for f→0, χ∼f1/(2z) and φχ=π/4z for T→TM. The static and dynamic exponents (ν2/3 and z3) as well as TM(H) are found to be in excellent agreement with our previous dc and ac transport measurements, lending strong support for a second-order phase transition. © 1994 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997