Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We report measurements of the optic index of refraction as a function of temperature, n (T), in the crystalline ferroelectrics having the simple perovskite (ABO3) structure. We show that these crystals possess a local, randomly oriented, nonreversible polarization below a temperature Td several hundred degrees above the ferroelectric phase-transition temperature Tc. Using a simple model, we account for this behavior and understand quantitatively the values of Td. This model, we believe, contains the basic physical understanding of ferroelectrics with a diffuse phase transition. © 1983 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures
R.W. Gammon, E. Courtens, et al.
Physical Review B
John G. Long, Peter C. Searson, et al.
JES