Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Bulk plasmon excitations in single 5-50 nm dia. Al spheres are detected with a 2 nm electron probe size. Damping due to electron-surface collisions is measured and a d.c. conductivity for individual spheres is derived. The results suggest that finite probe size effects need to be included in the scattering theory. © 1980.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Hiroshi Ito, Reinhold Schwalm
JES
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001