Conference paperA NOVEL DUAL-AXIAL AFM CANTILEVER WITH INDEPENDENT PIEZORESISTIVE SENSORS FOR SIMULTANEOUS DETECTION OF LATERAL AND VERTICAL FORCESBenjamin W. Chui, Thomas W. Kenny, et al.IMECE 1997
PaperElectrostatic Writing and Imaging Using a Force MicroscopeFrank Saurenbach, Bruce D. TerrisIEEE Transactions on Industry Applications
PaperLow-stiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high-density AFM thermomechanical data storageBenjamin W. Chui, Timothy D. Stowe, et al.JMEMS
Paper6-MHz 2-N/m piezoresistive atomic-force-microscope cantilevers with INCISIVE tipsRobert P. Ried, H. Jonathon Mamin, et al.JMEMS
