PaperA novel dual-axial AFM cantilever with independent piezoresistive sensors for simultaneous detection of lateral and vertical forcesBenjamin W. Chui, Thomas W. Kenny, et al.IMECE 1997
PaperLarge-field particle beam optics for projection and proximity printing and for maskless lithographyHans Loeschner, Gerhard Stengl, et al.Journal of Microlithography, Microfabrication and Microsystems
Conference paperA NOVEL DUAL-AXIAL AFM CANTILEVER WITH INDEPENDENT PIEZORESISTIVE SENSORS FOR SIMULTANEOUS DETECTION OF LATERAL AND VERTICAL FORCESBenjamin W. Chui, Thomas W. Kenny, et al.IMECE 1997
Conference paperRecording properties of patterned Co70Pt18Cr12 perpendicular mediaManfred Albrecht, Charles T. Rettner, et al.INTERMAG 2002