Defects in amorphous hydrogenated silicon nitride films

Jerzy Kanicki; W.L. Warren

doi:10.1016/0022-3093(93)91180-B

Journal of Non-Crystalline Solids

Paper

02 Dec 1993

Defects in amorphous hydrogenated silicon nitride films

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Abstract

In this paper we review the structural identification and electronic properties of the K- and N-centers, and positive charges in as-deposited and UV-illuminated amorphous silicon nitride thin films. © 1993.

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