Conference paperDemonstration of 300 Gbps error-free transmission of WDM data stream in silicon photonic wiresXiaogang Chen, Benjamin G. Lee, et al.CLEO 2007
Conference paperFast source independent estimation of lithographic difficulty supporting large scale source optimizationDavid Demaris, Maria Gabrani, et al.SPIE Advanced Lithography 2012
Conference paperRadiometric consistency in source specifications for photolithographyAlan E. Rosenbluth, Jaione Tirapu Azpiroz, et al.COSI 2011
Conference paperExperimental result and simulation analysis for the use of pixelated illumination from source mask optimization for 22nm logic lithography processKafai Lai, Alan E. Rosenbluth, et al.SPIE Advanced Lithography 2009