Detection of SiH2 in silane and disilane glow discharges by frequency modulation absorption spectroscopy

J.M. Jasinski; E.A. Whittaker; G.C. Bjorklund; R.W. Dreyfus; R.D. Estes; R.E. Walkup

doi:10.1063/1.94675

Applied Physics Letters

Paper

01 Dec 1984

Detection of SiH₂ in silane and disilane glow discharges by frequency modulation absorption spectroscopy

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Abstract

The reactive species SiH2 has been directly observed in dc glow discharges using the technique of frequency modulation absorption spectroscopy. The spatial distribution of SiH2 in the discharge and the relative amounts of SiH2 in silane and disilane discharges have been measured.

Conference paper