Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
Robert F. Gordon, Edward A. MacNair, et al.
WSC 1985
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Shu Tezuka
WSC 1991