Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Recently introduced conservation laws for volume expansion rates are used as a tool to investigate changes in the geometric and dynamical structure of strange attractors occurring, e.g., upon variation of a parameter. The appearance of edges in the Renyi dimension functionDqand metric entropy q is an indication of such transitions. A way to classify them by introducing two new indices jq and q+ is discussed. Moreover, these critical points can be analyzed in terms of phase transitions, in the framework of the thermodynamic formalism for dynamical systems. © IOP Publishing Ltd.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B
R. Ghez, J.S. Lew
Journal of Crystal Growth
R.D. Murphy, R.O. Watts
Journal of Low Temperature Physics