Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We present a direct measurement of the density of states of a two-dimensional electron gas in a quantizing magnetic field. By measuring the magnetocapacitance of modulation-doped GaAs-(AlGa) As heterostructures at low frequencies, we have observed quantum oscillations resulting from changes in the density of states alone. © 1985 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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