Ellen J. Yoffa, David Adler
Physical Review B
A general methodology for direct thermal patterning of self-assembled nanoparticle films is presented. Specifically, using laser heating we have fabricated ferromagnetic FePt nanoparticle array patterns with 0.8 μm pitch and an edge resolution of ∼100 nm. The nanoparticle arrays have been investigated by scanning SQUID microscopy and MFM. Finally, we have measured the patterning rate as a function of temperature by monitoring the change in optical reflectance.
Ellen J. Yoffa, David Adler
Physical Review B
Mark W. Dowley
Solid State Communications
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
John G. Long, Peter C. Searson, et al.
JES