Performance measurement and data base design
Alfonso P. Cardenas, Larry F. Bowman, et al.
ACM Annual Conference 1975
This paper presents a dual-stage approach to nanopositioning in which the tradeoff between the scanner speed and range is addressed by combining a slow, large-range scanner with a short-range scanner optimized for high-speed, high-resolution positioning. We present the design, finite-element simulations, and experimental characterization of a fast custom-built short-range scanner. The short-range scanner is based on electromagnetic actuation to provide high linearity, has a clean, high-bandwidth dynamical response and is equipped with a low-noise magnetoresistance-based sensor. By using advanced noise-resilient feedback controllers, the dual-stage system allows large-range positioning with subnanometer closed-loop resolution over a wide bandwidth. Experimental results are presented in which the dual-stage scanner system is used for imaging in a custom-built atomic force microscope. © 1996-2012 IEEE.
Alfonso P. Cardenas, Larry F. Bowman, et al.
ACM Annual Conference 1975
Khaled A.S. Abdel-Ghaffar
IEEE Trans. Inf. Theory
Eric Price, David P. Woodruff
FOCS 2011
Bowen Zhou, Bing Xiang, et al.
SSST 2008