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Modeling polarization for Hyper-NA lithography tools and masks
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SPIE Advanced Lithography 2007
Injection laser lifetime data are subjected to a simple screening test to identify the longer lived units. The effect this has on the lifetime distribution, and in particular, on the reliability of a system composed of a set of these lasers is considered. © 1980 IEEE
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Proceedings of SPIE 1989
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Surface Science