Arpan P. Mahorowala, Katherina Babich, et al.
Proceedings of SPIE - The International Society for Optical Engineering
We show that the surface morphology and electrical properties of graphene grown on SiC(0001) wafers depend strongly on miscut angle, even for nominally "on-axis" wafers. Graphene grown on pit-free surfaces with narrow terraces (miscut above 0.28°) shows substantially lower Hall mobility than graphene on surfaces with miscut angles below 0.1° that have wider terraces with some pits. The effect of pits on mobility is not detrimental if flat, pit-free areas with dimensions larger than the carrier mean free path remain between pits. Using these results, we optimized the growth process, achieving room-temperature mobility up to 3015 cm2 /V s at N=2.0× 10 12 cm-2. © 2011 American Institute of Physics.
Arpan P. Mahorowala, Katherina Babich, et al.
Proceedings of SPIE - The International Society for Optical Engineering
Christos Dimitrakopoulos, Yu-Ming Lin, et al.
Journal of Vacuum Science and Technology B
E. T. Ryan, Deepika Priyadarshini, et al.
IITC/MAM 2015
Deepika Priyadarshini, Son Nguyen, et al.
IITC/AMC 2014